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Welcome to Bilkent MEMS Research Group Website!

Our current research interests include:

  • Micro-Electro-Mechanical Systems (MEMS) design
  • Microfabrication of MEMS sensors
  • Discrete and integrated (ASIC) MEMS readout circuits
  • Analytical modeling of MEMS
  • MEMS digital control
  • Characterization and advanced sensor calibration

Current projects:

Advanced sensor calibration with on-chip stress sensing

n=2 operational modes of the ring gyroscope

Drive mode, cos⁡(2𝜃)
Sense mode, sin⁡(2𝜃)

Gas sensing by coupling resonators through cavity acoustic resonance

February 2026 group photo

If you are interested in our research or have any questions,
Reach out to us:

Erdinc Tatar,  etatar[at]ee.bilkent.edu.tr