Welcome to Bilkent MEMS Research Group Website!
Our current research interests include:
- Micro-Electro-Mechanical Systems (MEMS) design
- Microfabrication of MEMS sensors
- Discrete and integrated (ASIC) MEMS readout circuits
- Analytical modeling of MEMS
- MEMS digital control
- Characterization and advanced sensor calibration
Current projects:
Advanced sensor calibration with on-chip stress sensing
n=2 operational modes of the ring gyroscope
Visualization of on-chip stress:
Evolution of 2-D stress over temperature within the ring gyroscope, calculated with our strain interpolation algorithm utilizing the on-chip stress sensors
The conflict strain and displacement captured by the stress sensors, which is inhomogeneous and causes unpredictable gyroscope behaviour. Measuring these strains enables a no-drift gyroscope.
Total strain and displacement (thermal expansion + conflict strain), which is mostly uniform. The nonuniformity of these fields is plotted on the left.
Gas sensing by coupling resonators through cavity acoustic resonance
If you are interested in our research or have any questions,
Reach out to us:
Erdinc Tatar, etatar[at]ee.bilkent.edu.tr
