{"id":2366,"date":"2023-05-04T09:56:51","date_gmt":"2023-05-04T09:56:51","guid":{"rendered":"https:\/\/micro.bilkent.edu.tr\/?page_id=2366"},"modified":"2023-05-05T07:16:05","modified_gmt":"2023-05-05T07:16:05","slug":"inertial-sensors","status":"publish","type":"page","link":"https:\/\/micro.bilkent.edu.tr\/?page_id=2366","title":{"rendered":"Inertial Sensors"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"2366\" class=\"elementor elementor-2366\">\n\t\t\t\t\t\t\t<div class=\"elementor-element elementor-element-f6c0e7e e-con-boxed e-flex e-con\" data-id=\"f6c0e7e\" data-element_type=\"container\" data-settings=\"{&quot;content_width&quot;:&quot;boxed&quot;}\">\n\t\t\t\t\t<div class=\"e-con-inner\">\n\t\t\t\t<div class=\"elementor-element elementor-element-b4624e5 elementor-widget elementor-widget-spacer\" data-id=\"b4624e5\" data-element_type=\"widget\" data-widget_type=\"spacer.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.13.0 - 24-04-2023 *\/\n.elementor-column .elementor-spacer-inner{height:var(--spacer-size)}.e-con{--container-widget-width:100%}.e-con-inner>.elementor-widget-spacer,.e-con>.elementor-widget-spacer{width:var(--container-widget-width,var(--spacer-size));--align-self:var(--container-widget-align-self,initial);--flex-shrink:0}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container,.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer,.e-con>.elementor-widget-spacer>.elementor-widget-container,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer{height:100%}.e-con-inner>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner,.e-con>.elementor-widget-spacer>.elementor-widget-container>.elementor-spacer>.elementor-spacer-inner{height:var(--container-widget-height,var(--spacer-size))}<\/style>\t\t<div class=\"elementor-spacer\">\n\t\t\t<div class=\"elementor-spacer-inner\"><\/div>\n\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d42d869 elementor-widget elementor-widget-heading\" data-id=\"d42d869\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.13.0 - 24-04-2023 *\/\n.elementor-heading-title{padding:0;margin:0;line-height:1}.elementor-widget-heading .elementor-heading-title[class*=elementor-size-]>a{color:inherit;font-size:inherit;line-height:inherit}.elementor-widget-heading .elementor-heading-title.elementor-size-small{font-size:15px}.elementor-widget-heading .elementor-heading-title.elementor-size-medium{font-size:19px}.elementor-widget-heading .elementor-heading-title.elementor-size-large{font-size:29px}.elementor-widget-heading .elementor-heading-title.elementor-size-xl{font-size:39px}.elementor-widget-heading .elementor-heading-title.elementor-size-xxl{font-size:59px}<\/style><h2 class=\"elementor-heading-title elementor-size-default\">MEMS Sensor Drift Suppression<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e8d6cbe elementor-widget elementor-widget-text-editor\" data-id=\"e8d6cbe\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.13.0 - 24-04-2023 *\/\n.elementor-widget-text-editor.elementor-drop-cap-view-stacked .elementor-drop-cap{background-color:#69727d;color:#fff}.elementor-widget-text-editor.elementor-drop-cap-view-framed .elementor-drop-cap{color:#69727d;border:3px solid;background-color:transparent}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap{margin-top:8px}.elementor-widget-text-editor:not(.elementor-drop-cap-view-default) .elementor-drop-cap-letter{width:1em;height:1em}.elementor-widget-text-editor .elementor-drop-cap{float:left;text-align:center;line-height:1;font-size:50px}.elementor-widget-text-editor .elementor-drop-cap-letter{display:inline-block}<\/style>\t\t\t\t<p>Drift is a major problem for MEMS inertial sensors.&nbsp; Gyroscope and accelerometer outputs are integrated to calculate the position in navigation applications.&nbsp; Sensor drift leads to unacceptable errors in navigation.&nbsp; Our research is focused on inertial sensor drift supression with on-chip stress sensors.&nbsp;<\/p>\n<p>We integrate stress sensors with MEMS gyroscope to calibrate its drift.&nbsp;<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0b5fd88 elementor-widget elementor-widget-image\" data-id=\"0b5fd88\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<style>\/*! elementor - v3.13.0 - 24-04-2023 *\/\n.elementor-widget-image{text-align:center}.elementor-widget-image a{display:inline-block}.elementor-widget-image a img[src$=\".svg\"]{width:48px}.elementor-widget-image img{vertical-align:middle;display:inline-block}<\/style>\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"1024\" height=\"429\" src=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/gyro-and-stress-schematic-1024x429.png\" class=\"attachment-large size-large wp-image-2396\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/gyro-and-stress-schematic-1024x429.png 1024w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/gyro-and-stress-schematic-300x126.png 300w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/gyro-and-stress-schematic-768x322.png 768w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/gyro-and-stress-schematic-1536x643.png 1536w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/gyro-and-stress-schematic.png 1968w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">A MEMS ring gyroscope is integrated with multiple stress sensors<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1f4e50a elementor-widget elementor-widget-text-editor\" data-id=\"1f4e50a\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Below is a picture of the overall test setup when MEMS sensor and the electronics are connected.\u00a0 The system is quite complex, consisting of front end amplifiers, multiplexers for the stress sensor reading, signal conditioning amplifiers, multiple control loops, PLL,&#8230;\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-a30ade3 elementor-widget elementor-widget-image\" data-id=\"a30ade3\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"1841\" height=\"832\" src=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/setup-with-gyro.png\" class=\"attachment-full size-full wp-image-2410\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/setup-with-gyro.png 1841w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/setup-with-gyro-300x136.png 300w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/setup-with-gyro-1024x463.png 1024w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/setup-with-gyro-768x347.png 768w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/setup-with-gyro-1536x694.png 1536w\" sizes=\"(max-width: 1841px) 100vw, 1841px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Overall test setup when MEMS and electronics are connected<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b3a0c38 elementor-widget elementor-widget-heading\" data-id=\"b3a0c38\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Stress Sensors<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-822200e elementor-widget elementor-widget-text-editor\" data-id=\"822200e\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Stress could be measured using different ways.\u00a0 Metal foil strain gauges and piezoresistance are typical examples.\u00a0 We measure stress with capacitive stress sensors that amplify the substrate strain and convert it to capacitance.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-eb2bd65 elementor-widget elementor-widget-image\" data-id=\"eb2bd65\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"1024\" height=\"512\" src=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/stress-sensor-1024x512.png\" class=\"attachment-large size-large wp-image-2401\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/stress-sensor-1024x512.png 1024w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/stress-sensor-300x150.png 300w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/stress-sensor-768x384.png 768w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/stress-sensor-1536x768.png 1536w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/stress-sensor.png 1798w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Capacitive stress sensor, the substrate strain is amplified by the bridge and converted into capacitance<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8eb9c13 elementor-widget elementor-widget-heading\" data-id=\"8eb9c13\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Analytical Modeling<\/h2>\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5006021 elementor-widget elementor-widget-text-editor\" data-id=\"5006021\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Analytical modeling enables deep understanding of the device operation in the presence of fabrication imperfections and stress.\u00a0 Full device operation could be implemented which is quite difficult with FEA (finite element analysis).\u00a0<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-4b004a1 elementor-widget elementor-widget-image\" data-id=\"4b004a1\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"1682\" height=\"681\" src=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_full.png\" class=\"attachment-full size-full wp-image-2419\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_full.png 1682w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_full-300x121.png 300w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_full-1024x415.png 1024w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_full-768x311.png 768w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_full-1536x622.png 1536w\" sizes=\"(max-width: 1682px) 100vw, 1682px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Modeling overview: we use assumed modes approach where we assume a constant mode shape for the outer ring and calculate the mode shapes of the supporting structures considering the boundary conditions.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-623ddc3 elementor-widget elementor-widget-text-editor\" data-id=\"623ddc3\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<p>Below is the comparison of measured vs reconstructed frequency response of the gyroscope modes using the analytical model.\u00a0 There are two gyroscope modes and all the drive and pick off conditions are presented.\u00a0 The device imperfections (sidewall angles, width nonuniformities) lead to two peaks in the frequency response.\u00a0 The second peaks enables us to predict the device nonidealities.<\/p>\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-db0497a elementor-widget elementor-widget-image\" data-id=\"db0497a\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t<figure class=\"wp-caption\">\n\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"1627\" height=\"1055\" src=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_results.png\" class=\"attachment-full size-full wp-image-2423\" alt=\"\" loading=\"lazy\" srcset=\"https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_results.png 1627w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_results-300x195.png 300w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_results-1024x664.png 1024w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_results-768x498.png 768w, https:\/\/micro.bilkent.edu.tr\/wp-content\/uploads\/2023\/05\/modeling_results-1536x996.png 1536w\" sizes=\"(max-width: 1627px) 100vw, 1627px\" \/>\t\t\t\t\t\t\t\t\t\t\t<figcaption class=\"widget-image-caption wp-caption-text\">Comparison of measured and reconstructed frequency response of the gyroscope  using the analytical model.  There are two modes of the gyroscope, and all the drive and pick off cases are presented.<\/figcaption>\n\t\t\t\t\t\t\t\t\t\t<\/figure>\n\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>MEMS Sensor Drift Suppression Drift is a major problem for MEMS inertial sensors.&nbsp; Gyroscope and accelerometer outputs are integrated to calculate the position in navigation applications.&nbsp; Sensor drift leads to unacceptable errors in navigation.&nbsp; Our research is focused on inertial sensor drift supression with on-chip stress sensors.&nbsp; We integrate stress sensors with MEMS gyroscope to &hellip;<\/p>\n<p class=\"read-more\"> <a class=\"\" href=\"https:\/\/micro.bilkent.edu.tr\/?page_id=2366\"> <span class=\"screen-reader-text\">Inertial Sensors<\/span> Read More &raquo;<\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-global-header-display":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","_ti_tpc_template_sync":false,"_ti_tpc_template_id":""},"_links":{"self":[{"href":"https:\/\/micro.bilkent.edu.tr\/index.php?rest_route=\/wp\/v2\/pages\/2366"}],"collection":[{"href":"https:\/\/micro.bilkent.edu.tr\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/micro.bilkent.edu.tr\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/micro.bilkent.edu.tr\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/micro.bilkent.edu.tr\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=2366"}],"version-history":[{"count":30,"href":"https:\/\/micro.bilkent.edu.tr\/index.php?rest_route=\/wp\/v2\/pages\/2366\/revisions"}],"predecessor-version":[{"id":2430,"href":"https:\/\/micro.bilkent.edu.tr\/index.php?rest_route=\/wp\/v2\/pages\/2366\/revisions\/2430"}],"wp:attachment":[{"href":"https:\/\/micro.bilkent.edu.tr\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=2366"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}